About this programme
This English-language Master's programme covers a wide range of subjects with a focus on future challenges in the fields of micro and nano systems. The courses provide world-class, future-oriented education in design, manufacturing, characterisation and integration of miniaturised components into engineering systems. The interdisciplinary courses cover fundamental theoretical knowledge in physics and engineering but also application-oriented skills in developing innovative electronic and micro mechanic semiconductor components. Courses and practical training (labs) address current and prospective needs of industrial and academic research. The programme is targeted at the following students: Students with a BSc in Electrical Engineering and Information Technology earned at Chemnitz University of Technology International and German students holding at least a Bachelor's degree in an equivalent academic field who wish to deepen and specialise their knowledge before entering industry or academia. Compulsory (obligatory) subjects (50 credits): Semiconductor Physics / Nanostructures (semester 2, lecture/seminar) Design of Heterogeneous Systems (semester 2, lecture/seminar/lab) Technologies for Micro and Nano Systems (semesters 1 & 2, lecture/seminar) Advanced Integrated Circuit Technology (semester 2, lecture/seminar) Microsystems Design (semester 1, lecture/seminar/lab) Micro and Nano Devices (semester 1, lecture/seminar/lab) Reliability of Micro and Nano Systems (semesters 1 & 2, lecture/seminar) Materials in Micro and Nano Technologies (semester 1, lecture/seminar) Smart Sensor Systems (semester 1, lecture/seminar/lab) Elective (optional) subjects: Students have to elect and pass subjects from the following catalogue in order to earn 20 credit points (CP): Microscopy and Analysis on the Nano Scale (semester 2, lecture/seminar) – 5 CP Surfaces, Thin Films and Interfaces (semester 3, lecture/seminar) – 5 CP Optoelectronic Devices (semester 3, lecture) – 5 CP Power Semiconductor Devices (semester 3, lecture/seminar) – 7 CP Test of Digital and Mixed-Signal Circuits (semester 1, lecture/seminar) – 5CP Fields and Waves (semester 2, lecture/seminar) – 5 CP Next Generation Internet (semesters 1 & 2, lecture) – 5 CP Advanced Mobile Networks (semesters 1 & 2, lecture/seminar) – 5 CP Micro Optical Systems (semester 2, lecture/seminar) – 3 CP Integrated Circuit Design – Transistor Level (semester 2, lecture/seminar/lab) – 5 CP Numerical Methods for Materials and Reliability of Micro and Nano Systems (semester 2, lecture/seminar) – 5 CP Failure Analytical Methods for Micro and Nano Systems (semester 3, lecture/seminar) – 5 CP Flexible Electronics (semester 2, lecture/seminar) – 5 CP Modern Battery Materials (semester 2, lecture/seminar) – 5 CP Automotive Sensor Systems (semester 2, lecture/seminar) – 5 CP Sensor Signal Evaluation Modern Battery Materials (semester 3, lecture/seminar) – 5 CP Research project (obligatory, to be done at the university) – semester 3 – 20 CP Master's thesis (obligatory, to be done at the university) – semester 4 – 30 CP
Course details verified 10 Sep 2026 — intakes, entry requirements and course facts · official source